Category:Tomoaki SATO

Tomoaki SATO

Executive Summary

Tomoaki SATO is an inventor who has filed 3 patents. Their primary areas of innovation include {by liquid etching only} (3 patents), {during, before or after processing of insulating layers} (1 patents), {for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (electrical measurement of diffusions (1 patents), and they have worked with companies such as TOKUYAMA CORPORATION (3 patents). Their most frequent collaborators include (3 collaborations), (3 collaborations), (2 collaborations).

Patent Filing Activity

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Technology Areas

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List of Technology Areas

• H01L21/32134 ({by liquid etching only}): 3 patents
• H01L21/02068 ({during, before or after processing of insulating layers}): 1 patents
• H01L22/12 ({for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions (electrical measurement of diffusions): 1 patents
• H01L21/30604 (Chemical or electrical treatment, e.g. electrolytic etching (to form insulating layers): 1 patents

Companies

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List of Companies

• TOKUYAMA CORPORATION: 3 patents

Collaborators

• Yuki KIKKAWA (3 collaborations)
• Takayuki NEGISHI (3 collaborations)
• Takafumi SHIMODA (2 collaborations)
• Kohei SAITO (2 collaborations)
• Hiroto YARIMIZU (1 collaborations)