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Category:Ankur Agarwal of Austin TX US

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Ankur Agarwal

Ankur Agarwal from Austin TX US has applied for patents in technology areas such as H01L21/66, G03F7/00, G03F7/004 with Tokyo Electron Limited.

Patents

SYSTEMS AND METHODS THAT USE INFRARED (IR) SPECTROSCOPY TO MONITOR PROCESS CHEMICALS UTILIZED IN A SEMICONDUCTOR PROCESS (18373582)

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