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Category:SHIGEO Koya of Tochigi JP

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SHIGEO Koya

SHIGEO Koya from Tochigi JP has applied for patents in technology areas such as G03F7/00, G03F7/20 with canon kabushiki kaisha.

Patents

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SEPARATION METHOD, AND ARTICLE MANUFACTURING METHOD (20250093788)

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